Fabrication of a Highly Dense Line Patterned Polystyrene Brush on Silicon Surfaces Using Very Large Scale Integration Processing
Author:
Affiliation:
1. Department of Polymer Engineering, National Taiwan University of Science and Technology, 43, Section 4, Keelung Road, Taipei, 106, Taiwan, Republic of China
Publisher
American Chemical Society (ACS)
Subject
Surfaces, Coatings and Films,Physical and Theoretical Chemistry,General Energy,Electronic, Optical and Magnetic Materials
Link
https://pubs.acs.org/doi/pdf/10.1021/jp103258n
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