1. Microsystem and Terahertz Research Center and Institute of Electronic Engineering, China Academy of Engineering Physics, Chengdu 610200, China
2. Key Laboratory for Comprehensive Energy Saving of Cold Regions Architecture of Ministry of Education and School of Materials Science and Engineering, Jilin Jianzhu University, Changchun 130118, China
3. Beijing Computational Science Research Center, Beijing 100193, China
4. College of Physics and Electronic Information Engineering, Neijiang Normal University, Neijiang 641100, China