1. Guangdong Provincial Key Laboratory of Chip and Integration Technology, School of Semiconductor Science and Technology, South China Normal University, Foshan 528225, China
2. Zhejiang Xinke Semiconductor Co., Ltd., Hangzhou 311400, China
3. College of Materials and Energy, Guangdong University of Technology, Guangzhou 510006, China
4. College of Optical Science and Engineering, Zhejiang University, Hangzhou 310027, China