Influence of Metal Substitution and Ion Energy on Microstructure Evolution of High-Entropy Nitride (TiZrTaMe)N1–x (Me = Hf, Nb, Mo, or Cr) Films-Reference-Cited by-同舟云学术

Influence of Metal Substitution and Ion Energy on Microstructure Evolution of High-Entropy Nitride (TiZrTaMe)N1–x (Me = Hf, Nb, Mo, or Cr) Films

Author:

Shu Rui¹^ORCID,Lundin Daniel²³,Xin Binbin¹,Sortica Mauricio A.⁴,Primetzhofer Daniel⁴⁵,Magnuson Martin¹,le Febvrier Arnaud¹,Eklund Per¹^ORCID

Affiliation:

1. Thin Film Physics Division, Department of Physics, Chemistry, and Biology (IFM), Linköping University, Linköping 581 83, Sweden

2. Plasma and Coatings Physics Division, Department of Physics, Chemistry and Biology (IFM), Linköping University, Linköping 581 83, Sweden

3. Laboratoire de Physique des Gaz et Plasmas—LPGP, UMR 8578 CNRS, Université Paris Saclay, Orsay Cedex 91405, France

4. The Tandem Laboratory, Uppsala University, Uppsala 75120, Sweden

5. Department of Physics and Astronomy, Uppsala University, Uppsala 75120, Sweden

Funder

VINNOVA

Knut och Alice Wallenbergs Stiftelse

M ? ERA.net

Swedish Government Strategic Research Area in Materials Science on Functional Materials at Link?ping University

the Swedish Foundation for Strategic Research

Publisher

American Chemical Society (ACS)

Subject

Materials Chemistry,Electrochemistry,Electronic, Optical and Magnetic Materials

Link

Reference41 articles.

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