High-Accuracy Prediction of ScAlN Thin Film Dry Etching Using Machine Learning Driven Regression Modeling-Reference-Cited by-同舟云学术

登录注册会员服务联系我们

High-Accuracy Prediction of ScAlN Thin Film Dry Etching Using Machine Learning Driven Regression Modeling

Published:2024-04-17 Issue:5 Volume:6 Page:3197-3205
ISSN:2637-6113
Container-title:ACS Applied Electronic Materials
language:en
Short-container-title:ACS Appl. Electron. Mater.

Author:

Shifat Abu Shami MD Zadid¹²^ORCID,Jaiswal Rahul³²,Chityala Ravi Kiran³²,Siddiqui Aleem⁴,Martinez-Ramon Manel³,Busani Tito³²

Affiliation:

1. Optical Science & Engineering, The University of New Mexico, Albuquerque, New Mexico 87131, United States

2. Center for High Tech Technology Materials (CHTM), Albuquerque, New Mexico 87106, United States

3. Electrical & Computer Engineering, The University of New Mexico, Albuquerque, New Mexico 87131, United States

4. Sandia National Laboratories, Albuquerque, New Mexico 87185, United States

Funder

Sandia National Laboratories

Publisher

American Chemical Society (ACS)

Link

https://pubs.acs.org/doi/pdf/10.1021/acsaelm.3c01846

Reference39 articles.

1. Piezoelectric Actuators and Ultrasonic Motors

2. Piezoelectric aluminum nitride thin-films: A review of wet and dry etching techniques

3. Epitaxial Aluminum Scandium Nitride Super High Frequency Acoustic Resonators

4. Characterization of AlN and AlScN film ICP etching for micro/nano fabrication

同舟云学术

1.学者识别学者识别

2.学术分析学术分析

3.人才评估人才评估

"同舟云学术"是以全球学者为主线，采集、加工和组织学术论文而形成的新型学术文献查询和分析系统，可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容，当前同舟云学术共收录了国内外主流学术期刊6万余种，收集的期刊论文及会议论文总量共计约1.5亿篇，并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询！咨询电话：010-8811{复制后删除}0370

www.globalauthorid.com

TOP