Synergistic Influence of the Deposition Method, Postdeposition Annealing, and Textured Substrates on the Properties of ITO Thin Films-Reference-Cited by-同舟云学术

Synergistic Influence of the Deposition Method, Postdeposition Annealing, and Textured Substrates on the Properties of ITO Thin Films

Published:2022-11-02 Issue:11 Volume:4 Page:5506-5518
ISSN:2637-6113
Container-title:ACS Applied Electronic Materials
language:en
Short-container-title:ACS Appl. Electron. Mater.

Author:

Anandan Rohini¹^ORCID,Rajendran Jagadish¹^ORCID,Piraviperumal Malar¹^ORCID

Affiliation:

1. Thinfilm Photovoltaics Laboratory, Department of Physics and Nanotechnology, SRM Institute of Science and Technology, Kattankulathur, Tamil Nadu603 203, India

Funder

SRM Institute of Science and Technology

Publisher

American Chemical Society (ACS)

Subject

Materials Chemistry,Electrochemistry,Electronic, Optical and Magnetic Materials

Link

https://pubs.acs.org/doi/pdf/10.1021/acsaelm.2c01126

Reference56 articles.

1. Transparent conductive Nb-doped TiO2 films deposited by direct-current magnetron sputtering using a TiO2−x target

2. Present status of transparent conducting oxide thin-film development for Indium-Tin-Oxide (ITO) substitutes

3. Transparent and conducting ITO films: new developments and applications

4. The effect of substrate temperature on the properties of ITO thin films for OLED applications

5. The effect of substrate temperature on the microstructural, electrical and optical properties of Sn-doped indium oxide thin films

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