1. Department of Materials Science & Engineering, National Yang-Ming Chiao Tung University, Hsinchu 30010, Taiwan
2. International College of Semiconductor Technology, National Yang-Ming Chiao Tung University, Hsinchu 30010, Taiwan
3. Corporate Research, Taiwan Semiconductor Manufacturing Company, Hsinchu 300092, Taiwan
4. Industry-Academia Innovation School, National Yang-Ming Chiao Tung University, Hsinchu 30010, Taiwan