Ultrashort Pulse Laser Lift-Off Processing of InGaN/GaN Light-Emitting Diode Chips

Author:

Yulianto Nursidik123ORCID,Kadja Grandprix T. M.45,Bornemann Steffen12,Gahlawat Soniya67,Majid Nurhalis38,Triyana Kuwat9,Abdi Fatwa F.6ORCID,Wasisto Hutomo Suryo12ORCID,Waag Andreas12

Affiliation:

1. Institute of Semiconductor Technology (IHT), Technische Universität Braunschweig, Hans-Sommer-Straße 66, Braunschweig 38106, Germany

2. Laboratory for Emerging Nanometrology (LENA), Technische Universität Braunschweig, Langer Kamp 6, Braunschweig 38106, Germany

3. Research Center for Physics, Indonesian Institute of Sciences (LIPI), Jl. Kawasan Puspiptek no. 441-442, Tangerang Selatan 15314, Indonesia

4. Division of Inorganic and Physical Chemistry, Faculty of Mathematics and Natural Sciences, Institut Teknologi Bandung, Jl Ganesha 10, Bandung 40132, Indonesia

5. Research Center for Nanosciences and Nanotechnology, Institut Teknologi Bandung, Jl. Ganesha 10, Bandung 40132, Indonesia

6. Institute for Solar Fuels, Helmholtz-Zentrum Berlin für Materialien und Energie GmbH, Hahn-Meitner-Platz 1, Berlin 14109, Germany

7. Department of Chemistry, Indian Institute of Technology Delhi, New Delhi 110016, India

8. Institute of Energy Research and Physical Technologies, Technische Universität Clausthal, Leibnizstraße 4, Clausthal-Zellerfeld 38678, Germany

9. Department of Physics, Faculty of Mathematics and Natural Sciences, Universitas Gadjah Mada, Sekip Utara P. O. Box BLS 21, Yogyakarta 55281, Indonesia

Funder

Nieders?chsisches Ministerium f?r Wissenschaft und Kultur

Deutsche Forschungsgemeinschaft

H2020 Future and Emerging Technologies

Kementerian Riset, Teknologi dan Pendidikan Tinggi

Indonesian - German Center for Nano- and Quantum Technologies

Publisher

American Chemical Society (ACS)

Subject

Materials Chemistry,Electrochemistry,Electronic, Optical and Magnetic Materials

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