1. Department of Advanced Interconnection Materials, The Institute of Scientific and Industrial Research, Osaka University, 8-1 Mihogaoka, Ibaraki, Osaka 567-0047, Japan
2. Nippon Shokubai Research Alliance Laboratories, 2-1, Yamadaoka, Suita, Osaka 565-0871, Japan
3. Research Center, Nippon Shokubai Co. Ltd., 5-8 Nishi Otabi-cho, Suita, Osaka 564-0034, Japan