1. Advanced Microelectronic Center Aachen (AMICA), AMO GmbH, Otto-Blumenthal-Strasse 25, 52074 Aachen, Germany
2. Chair of Electronic Devices, Faculty of Electrical Engineering and Information Technology, RWTH Aachen University, Otto-Blumenthal-Strasse 2, 52074 Aachen, Germany
3. Department of Microtechnology and Nanoscience, Chalmers University of Technology, SE-41296 Gothenburg, Sweden
4. Institute for High-Frequency and Communication Technology, University of Wuppertal, 42119 Wuppertal, Germany
5. Chair of Smart Sensor Systems, University of Wuppertal, 42119 Wuppertal, Germany