1. School of Microelectronics, Dalian University of Technology, Dalian Liaoning, 116024, China
2. Key Laboratory of Materials Modification By Laser, Ion and Electron Beams (Ministry of Education), School of Physics, Dalian University of Technology, Dalian Liaoning, 116024, China
3. State Key Laboratory of ASIC and Systems, School of Microelectronics, Fudan University, Shanghai 200433, China
4. Institute of Microelectronics, Tsinghua University, Beijing 100084, China