1. Key Lab of Semiconductor Materials Science, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China
2. Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing 100049, China
3. School of Materials and Energy, Lanzhou University, Lanzhou 730000, China
4. Joint Lab of Digital Optical Chip, Wuyi University, Jiangmen 529020, China