Analysis of the Reaction Layer Formed during Sapphire–Sapphire Brazing Using a Ag–Cu–Ti Filler Metal for Gas-Pressure Sensors-Reference-Cited by-同舟云学术

Analysis of the Reaction Layer Formed during Sapphire–Sapphire Brazing Using a Ag–Cu–Ti Filler Metal for Gas-Pressure Sensors

Published:2022-04-28 Issue:5 Volume:4 Page:2405-2412
ISSN:2637-6113
Container-title:ACS Applied Electronic Materials
language:en
Short-container-title:ACS Appl. Electron. Mater.

Author:

Zaharinie Tuan¹²,Huda Zainul³^ORCID,Ibrahim Suriani¹²,Yusof Farazila¹²,Hamdi Mohd¹²,Rehan Mohammad⁴,Ariga Tadashi⁵

Affiliation:

1. Department of Mechanical Engineering, Universiti Malaya, 50603 Kuala Lumpur, Malaysia

2. Centre of Advanced Manufacturing & Material Processing (AMMP Centre), Universiti Malaya, 50603 Kuala Lumpur, Malaysia

3. Department of Mechanical Engineering, King Abdulaziz University, Jeddah 21589, Saudi Arabia

4. Center of Excellence in Environmental Studies (CEES), King Abdulaziz University, Jeddah 21589, Saudi Arabia

5. Department of Materials Science, School of Engineering, Tokai University, 1117 Kitakaname, Hiratsuka-shi, Kanagawa 259-1292, Japan

Funder

Ministry of Higher Education, Malaysia

Institut Pengurusan dan Pemantauan Penyelidikan, Universiti Malaya

Publisher

American Chemical Society (ACS)

Subject

Materials Chemistry,Electrochemistry,Electronic, Optical and Magnetic Materials

Link

https://pubs.acs.org/doi/pdf/10.1021/acsaelm.2c00213

Reference25 articles.

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2. Nicholas, M. G.; Crispin, R.M. Copper-Ceramic Materials; INCRA Report, 1986.

3. Ishihara, T.; Sekine, M.; Ishikura, Y.; Kimura, S.; Harada, H.; Nagata, M.; Masuda, T. In Sapphire-based Capacitance Diaphram Gauge for High Temeperature Applications, Tranducers ‘05, Proccedings of the 13th International Conference on Solid-State Sensors, Actuators and Microsystems, Seol, South Korea, June 5-9, 2005; pp 503–506.

4. Performance of Zr and Ti adhesion layers for bonding of platinum metallization to sapphire substrates

5. Micromachined pressure sensor based on sapphire for high temperature applications