Structure and Morphology of Fluorocarbon Films Grown by Hot Filament Chemical Vapor Deposition-Reference-Cited by-同舟云学术

Structure and Morphology of Fluorocarbon Films Grown by Hot Filament Chemical Vapor Deposition

Published:2000-09-08 Issue:10 Volume:12 Page:3032-3037
ISSN:0897-4756
Container-title:Chemistry of Materials
language:en
Short-container-title:Chem. Mater.

Author:

Lau Kenneth K. S.¹,Caulfield Jeffrey A.¹,Gleason Karen K.¹

Affiliation:

1. Department of Chemical Engineering, Massachusetts Institute of Technology, Cambridge, Massachusetts 02139, and Department of Chemical & Bioresource Engineering, Colorado State University, Fort Collins, Colorado 80523

Publisher

American Chemical Society (ACS)

Subject

Materials Chemistry,General Chemical Engineering,General Chemistry

Link

https://pubs.acs.org/doi/pdf/10.1021/cm000499w

Reference58 articles.

1. Growth of fluorocarbon polymer thin films with high CF2 fractions and low dangling bond concentrations by thermal chemical vapor deposition

2. Modeling of non-isothermal glow discharge modification of PTFE using low-energy ion beams

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