Systematic Regeneration of Waste Sulfuric Acid in Semiconductor Manufacturing Using Batch Vacuum Distillation-Reference-Cited by-同舟云学术

Systematic Regeneration of Waste Sulfuric Acid in Semiconductor Manufacturing Using Batch Vacuum Distillation

Author:

Park Seongho¹,Jung Jaeheum¹,Song Kiwook¹,Kshetrimayum Krishnadash S.¹,Jeong Changhyun²,Han Chonghun¹

Affiliation:

1. School of Chemical and Biological Engineering, Seoul National University, Gwanak-ro 599, Gwanak-gu, Seoul 151-742, South Korea

2. Basic Engineering Department, Samsung Engineering Co. Ltd., Samsung GEC, 26, Sangil-ro 6-gil, Gangdong-gu, Seoul,134-728, South Korea

Publisher

American Chemical Society (ACS)

Subject

Industrial and Manufacturing Engineering,General Chemical Engineering,General Chemistry

Link

Reference26 articles.

2. Schiessler, S.; von Plessen, H.Process for regenerating sulfuric acid. U.S. Patent 3972987, 1976.

3. Brian, P. L.; Chen, M. S.; Mazzafro, W. J.; Vora, S. M.Process for concentrating sulfuric acid in an evaporator. U.S. Patent 4409064, 1983.

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