Model Studies on the Photochemistry of Phenolic Sulfonate Photoacid Generators
Author:
Affiliation:
1. Department of Chemistry, University of Ottawa, Ottawa, Ontario, Canada K1N 6N5, and Shipley Company, 455 Forest Street, Marlboro, Massachusetts 01752-3092
Publisher
American Chemical Society (ACS)
Subject
Materials Chemistry,General Chemical Engineering,General Chemistry
Link
https://pubs.acs.org/doi/pdf/10.1021/cm980052b
Reference20 articles.
1. Willson, C. G.Introduction to Microlithography,2nd ed.; Thompson, L. F., Willson, C. G., Bowden, M. J., Eds.; American Chemical Society: Washington, DC, 1994; p 139. Reiser, A.Photoreactive Polymers: TheScience and Technology of Resists; John Wiley and Sons: New York, 1989; p 409.
2. Chemical amplification mechanisms for microlithography
3. Thermal Stability of Sulfonate Ester Photoacid Generators in Phenolic Matrixes
4. Nitrobenzyl ester chemistry for polymer processes involving chemical amplification
5. Photochemical dissociation of p-nitrobenzyl 9,10-dimethoxyanthracene-2-sulphonate via intramolecular electron transfer
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