Graphene-Assisted Chemical Etching of Silicon Using Anodic Aluminum Oxides as Patterning Templates
Author:
Affiliation:
1. Department of Applied Physics and Institute of Natural Sciences, Kyung Hee University, Yongin 446-701, Korea
Funder
National Research Foundation of Korea
Publisher
American Chemical Society (ACS)
Subject
General Materials Science
Link
https://pubs.acs.org/doi/pdf/10.1021/acsami.5b07773
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