Nanostructure and Composition Control of Fluorocarbon Films from Modulated Tetrafluoroethylene Plasmas-Reference-Cited by-同舟云学术

Nanostructure and Composition Control of Fluorocarbon Films from Modulated Tetrafluoroethylene Plasmas

Published:2002-10-22 Issue:24 Volume:35 Page:8920-8922
ISSN:0024-9297
Container-title:Macromolecules
language:en
Short-container-title:Macromolecules

Author:

Cicala G.¹,Milella A.¹,Palumbo F.¹,Rossini P.¹,Favia P.¹,d'Agostino R.¹

Affiliation:

1. Istituto di Metodologie Inorganiche e dei Plasmi, CNR, Sezione di BARI, Dipartimento di Chimica-Università di Bari, Via Orabona, 4, 70126 Bari, Italy

Publisher

American Chemical Society (ACS)

Subject

Materials Chemistry,Inorganic Chemistry,Polymers and Plastics,Organic Chemistry

Link

https://pubs.acs.org/doi/pdf/10.1021/ma025536e

Reference15 articles.

1. d'Agostino, R.; Cramarossa, F.; Fracassi, F.; Illuzzi, F. InPlasmaDeposition, Treatment, and Etching of Polymers; d'Agostino, R., Ed.; Academic Press: San Diego, CA, 1990; Chapter 2, pp 95−162.

2. Time-resolved optical emission spectroscopy of modulated plasmas for amorphous silicon deposition

3. Yoshida, T.; Ichikawa, Y.; Sakai, H.Proceedings of the 9th European PVSolar Energy Conference (Freiburg); Palz, W., Wrixon, G. T., Helm, P., Eds.; Kluwer Academic Publisher: Dordrecht, The Netherlands, 1989; pp 1006−1009.

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