Organic–Inorganic Hybrid Thermoset-Based Dual Tone-Type Photosensitive Material
Author:
Affiliation:
1. Yokkaichi Research Center, JSR Corporation, 100 Kawajiri-cho, Yokkaichi, Mie 510-8552, Japan
Publisher
American Chemical Society (ACS)
Subject
Organic Chemistry,Polymers and Plastics,Process Chemistry and Technology
Link
https://pubs.acs.org/doi/pdf/10.1021/acsapm.2c01049
Reference30 articles.
1. Sasajima, H.; Watanabe, I.; Takamoto, M.; Dakede, K.; Itoh, S.; Nishitani, Y.; Tabei, J.; Mori, T. In Materials for Advanced Packaging, 2nd ed. Lu, D.; Wong, C. P., Eds. Springer International Publishing: Cham, Switzerland, 2017; Chapter 9, pp 373–419.
2. One‐Step Synthesis of Alkaline‐Soluble Polystyrene Containing Trimethoxysilyl‐ and Boronic Acid‐Moieties as Inorganic, Reactive Pendant Groups for Photosensitive Materials
3. Advanced patterning approaches based on negative-tone development (NTD) process for further extension of 193nm immersion lithography
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