1. Department
of Electrical and Computer Engineering, University of Illinois at Urbana−Champaign, William L. Everitt Laboratory, 1406 West
Green Street, Urbana, Illinois 61801, United States
2. Micro
and Nanotechnology Lab, University of Illinois at Urbana−Champaign, 208 North Wright Street, Urbana, Illinois 61801, United States
3. Taiwan Semiconductor
Manufacturing Company, 9 Creation Rd,
Hsinchu Science Park, Hsinchu, Taiwan 300-77, R.O.C.
4. Department
of Bioengineering, University of Illinois at Urbana−Champaign, 1270 Digital Computer Laboratory, 1304 West Springfield Avenue, Urbana, Illinois 61801, United States
5. Department
of Mechanical Science and Engineering, University of Illinois at Urbana−Champaign, 1206 West Green Street, Urbana, 61801 Illinois, United States