1. Physics Department, Lomonosov Moscow State University, Moscow 119991, Russia
2. Kotelnikov Institute of Radioengineering and Electronics of RAS, Moscow 125009, Russia
3. Experimentelle Physik 2, Technische Universität Dortmund, Dortmund 44227, Germany
4. ITMO University, Saint Petersburg 197101, Russia
5. Hybrid Photonics Laboratory, École Polytechnique Fédérale de Lausanne, Lausanne CH-1015, Switzerland
6. Material Science Department, Lomonosov Moscow State University, Moscow 119991, Russia