Silicon Nitride Surface Modification by Ion Bombardment with Physisorbed Hydrofluorocarbons: Theoretical Assessment
Author:
Affiliation:
1. Texas Materials Institute, The University of Texas at Austin, Austin, Texas 78712, United States
2. McKetta Department of Chemical Engineering, The University of Texas at Austin, Austin, Texas 78712, United States
Funder
Tokyo Electron
Publisher
American Chemical Society (ACS)
Subject
Surfaces, Coatings and Films,Physical and Theoretical Chemistry,General Energy,Electronic, Optical and Magnetic Materials
Link
https://pubs.acs.org/doi/pdf/10.1021/acs.jpcc.3c05459
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5. Molecular Simulation of Water and Hydration Effects in Different Environments: Challenges and Developments for DFTB Based Models
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