1. School of Materials Science and Engineering, Zhejiang University, Hangzhou 310027, China
2. State Key Laboratory of Integrated Optoelectronics, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China
3. Shijia Photonics Technology, Hebi 458030, China
4. Wuhan National Laboratory for Optoelectronics, Wuhan 430074, China
5. State Key lab of Modern Optical Instrumentation and College of Optical Science and Engineering, Zhejiang University, Hangzhou 310027, China