Trimethylboron as Single-Source Precursor for Boron–Carbon Thin Film Synthesis by Plasma Chemical Vapor Deposition
Author:
Affiliation:
1. Department of Physics, Chemistry and Biology, Linköping University, SE-581 83 Linköping, Sweden
2. European Spallation Source ERIC, P.O. Box 176, SE-221 00, Lund, Sweden
3. Mid-Sweden University, SE-85170, Sundsvall, Sweden
Funder
Knut and Alice Wallenberg Foundation
Carl Tryggers Foundation
European Spallation Source ERIC
BrightnESS project
Publisher
American Chemical Society (ACS)
Subject
Surfaces, Coatings and Films,Physical and Theoretical Chemistry,General Energy,Electronic, Optical and Magnetic Materials
Link
http://pubs.acs.org/doi/pdf/10.1021/acs.jpcc.6b06529
Reference23 articles.
1. Structural characterisation of B4C films deposited by laser-assisted CVD
2. Characterization of boron carbide thin films fabricated by plasma enhanced chemical vapor deposition from boranes
3. B4C thin films for neutron detection
4. Hall-Wilton, R.; Höglund, C.; Imam, M.; Kanaki, K.; Khaplanov, A.; Kirstein, O.; Kittelmann, T.; Nilsson, B.; Scherzinger, J.Detectors for the European Spallation Source ESS AB.IEEE NSS/MIC Conference Record, Anaheim, CA, Oct. 27–Nov. 3, 2012;Yu, B., Eds.IEEE:Anaheim, 2012.
5. Stability of 10B4C thin films under neutron radiation
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