1. Centre for Plasma and Laser Engineering, The Szewalski Institute of Fluid-Flow Machinery, Polish Academy of Sciences, Fiszera 14, Gdańsk 80-231, Poland
2. Department of Metrology and Optoelectronics, Faculty of Electronics, Telecommunications and Informatics, Gdańsk University of Technology, Narutowicza 11/12, Gdańsk 80-233, Poland
3. Institute of Microelectronics and Optoelectronics, Faculty of Electronics and Information Technology, Warsaw University of Technology, Koszykowa 75, Warsaw 00-662, Poland
4. Institute of Nanotechnology and Materials Engineering and Advanced Materials Center, Gdańsk University of Technology, Narutowicza 11/12, Gdańsk 80-233, Poland