Molecular Depth Profiling with Argon Gas Cluster Ion Beams
Author:
Affiliation:
1. Department of Chemistry, The Pennsylvania State University, University Park, Pennsylvania 16802, United States
2. Department of Physics, University of Duisburg-Essen, 47048 Duisburg, Germany
Funder
National Institute of General Medical Sciences
Publisher
American Chemical Society (ACS)
Subject
Surfaces, Coatings and Films,Physical and Theoretical Chemistry,General Energy,Electronic, Optical and Magnetic Materials
Link
https://pubs.acs.org/doi/pdf/10.1021/acs.jpcc.5b03482
Reference38 articles.
1. Secondary−ion mass spectrometry and its use in depth profiling
2. On the use of CsX+ cluster ions for major element depth profiling in secondary ion mass spectrometry
3. Sputter Depth Profiling of Microelectronic Structures
4. A C60 Primary Ion Beam System for Time of Flight Secondary Ion Mass Spectrometry: Its Development and Secondary Ion Yield Characteristics
5. Tissue Molecular Ion Imaging by Gold Cluster Ion Bombardment
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