Effect of Insertion of B4C at the Interface Mo/Be Depending on the Film Order
Author:
Affiliation:
1. Institute of Physics, St-Petersburg State University, Ulyanovskaya Street 1, Peterhof, 198504 St. Petersburg, Russia
2. Institute for Physics of Microstructure, Russian Academy of Sciences, Nizhny Novgorod 603087, Russia
Funder
Russian Science Foundation
Publisher
American Chemical Society (ACS)
Subject
Surfaces, Coatings and Films,Physical and Theoretical Chemistry,General Energy,Electronic, Optical and Magnetic Materials
Link
https://pubs.acs.org/doi/pdf/10.1021/acs.jpcc.0c07242
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4. Mo/Si Multilayer Mirrors with B4C and Be Barrier Layers
5. Maskless extreme ultraviolet lithography
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