1. Center for Modern Physics Technology, Applied Physics Department, School of Mathematics and Physics, University of Science and Technology, Beijing 100083, China
2. School of Materials Science and Engineering, Beihang University, Beijing 100191, China
3. Guangdong Institute of Semiconductor Industrial Technology, Guangdong Academy of Sciences, Guangzhou 510650, China
4. Russian Quantum Center, Moscow 143025, Russia
5. Lomonosov Moscow State University, Moscow 119991, Russia