Reaction Pathways for Atomic Layer Deposition with Lithium Hexamethyl Disilazide, Trimethyl Phosphate, and Oxygen Plasma-Reference-Cited by-同舟云学术

Reaction Pathways for Atomic Layer Deposition with Lithium Hexamethyl Disilazide, Trimethyl Phosphate, and Oxygen Plasma

Published:2020-12-08 Issue:50 Volume:124 Page:27829-27839
ISSN:1932-7447
Container-title:The Journal of Physical Chemistry C
language:en
Short-container-title:J. Phys. Chem. C

Author:

Werbrouck Andreas¹^ORCID,Mattelaer Felix¹^ORCID,Minjauw Matthias¹^ORCID,Nisula Mikko¹^ORCID,Julin Jaakko²,Munnik Frans³,Dendooven Jolien¹^ORCID,Detavernier Christophe¹^ORCID

Affiliation:

1. Department of Solid State Sciences, Ghent University, Krijgslaan 281, 9000 Ghent, Belgium

2. Department of Physics, University of Jyväskylä, P.O. Box 35, 40014 Jyväskylä, Finland

3. Institute of Ion Beam Physics and Materials Research, Helmholtz-Zentrum Dresden-Rossendorf, Bautzner Landstraße 400, 01328 Dresden, Germany

Funder

Universiteit Gent

Fonds Wetenschappelijk Onderzoek

Publisher

American Chemical Society (ACS)

Subject

Surfaces, Coatings and Films,Physical and Theoretical Chemistry,General Energy,Electronic, Optical and Magnetic Materials

Link

https://pubs.acs.org/doi/pdf/10.1021/acs.jpcc.0c09284

Reference29 articles.

1. Nilsen, O.; Gandrud, K. B.; Ruud, A.; Fjellvåg, H. In Atomic Layer Deposition in Energy Conversion Applications; Bachmann, J., Ed. John Wiley & Sons: 2017; Chapter 6, pp 183–207.

2. Elegant design of electrode and electrode/electrolyte interface in lithium-ion batteries by atomic layer deposition

3. The Influence of Ultrathin Amorphous ALD Alumina and Titania on the Rate Capability of Anatase TiO2 and LiMn2 O4 Lithium Ion Battery Electrodes

4. Synergistic Effect of 3D Current Collectors and ALD Surface Modification for High Coulombic Efficiency Lithium Metal Anodes

5. Advances in 3D Thin‐Film Li‐Ion Batteries

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