Large-Scale Production of Amorphous Silicon Oxynitride Nanowires by Nickel-Catalyzed Transformation of Silicon Wafers in NH3 Plasma-Reference-Cited by-同舟云学术

Large-Scale Production of Amorphous Silicon Oxynitride Nanowires by Nickel-Catalyzed Transformation of Silicon Wafers in NH3 Plasma

Published:2007-12-12 Issue:1 Volume:112 Page:27-34
ISSN:1932-7447
Container-title:The Journal of Physical Chemistry C
language:en
Short-container-title:J. Phys. Chem. C

Author:

Zheng Jie¹,Song Xubo¹,Li Xingguo¹,Pu Yikang¹

Affiliation:

1. Beijing National Laboratory for Molecular Sciences (BNLMS) (The State Key Laboratory of Rare Earth Materials Chemistry and Applications), College of Chemistry and Molecular Engineering, Peking University, Beijing, 100871, People's Republic of China, College of Engineering, Peking University, Beijing, 100871, People's Republic of China, and Department of Engineering Physics, Tsinghua University, Beijing, 100084 People's Republic of China

Publisher

American Chemical Society (ACS)

Subject

Surfaces, Coatings and Films,Physical and Theoretical Chemistry,General Energy,Electronic, Optical and Magnetic Materials

Link

https://pubs.acs.org/doi/pdf/10.1021/jp075313w

Reference46 articles.

1. Scaling the gate dielectric: Materials, integration, and reliability

2. Silicon oxynitride planar waveguiding structures for application in optical communication

3. Silicon Oxynitride

4. Design, tolerance analysis, and fabrication of silicon oxynitride based planar optical waveguides for communication devices

5. Tunneling leakage current in oxynitride: dependence on oxygen/nitrogen content

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