The Preparation and Investigation of Macromolecular Architectures for Microlithography by "Living" Free Radical Polymerization
Author:
Affiliation:
1. Shipley Company, 455 Forest Street, Marlborough, MA 01752-3092
2. IBM Almanden Research Center, Center for Polymeric Interfaces and Macromolecular Assemblies, 650 Harry Road, San Jose, CA 95120-6099
Publisher
American Chemical Society
Link
https://pubs.acs.org/doi/pdf/10.1021/bk-1998-0706.ch012
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