Environment-Friendly Photolithography Using Poly(N-isopropylacrylamide)-Based Thermoresponsive Photoresists
Author:
Affiliation:
1. Max-Planck-Institute of Molecular Cell Biology and Genetics, Pfotenhauer Str. 108, 01307 Dresden, Germany, and Leibniz Institute of Polymer Research Dresden, Hohe Str. 6, 01069 Dresden, Germany
Publisher
American Chemical Society (ACS)
Subject
Colloid and Surface Chemistry,Biochemistry,General Chemistry,Catalysis
Link
https://pubs.acs.org/doi/pdf/10.1021/ja902660s
Reference25 articles.
1. Formation of Patterned Microstructures of Conducting Polymers by Soft Lithography, and Applications in Microelectronic Device Fabrication
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4. Surface-Directed Liquid Flow Inside Microchannels
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