Micromachined Fabry−Pérot Interferometer with Embedded Nanochannels for Nanoscale Fluid Dynamics
Author:
Affiliation:
1. MESA+ Institute for Nanotechnology, University of Twente, P.O. Box 217, 7500 AE Enschede, The Netherlands
Publisher
American Chemical Society (ACS)
Subject
Mechanical Engineering,Condensed Matter Physics,General Materials Science,General Chemistry,Bioengineering
Link
https://pubs.acs.org/doi/pdf/10.1021/nl062447x
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