Controllable Photonic Structures on Silicon-on-Insulator Devices Fabricated Using Femtosecond Laser Lithography
Author:
Affiliation:
1. Division of Ionizing Radiation Metrology, National Institute of Metrology, Beijing 100029, P. R. China
2. Department of Chemistry, Tsinghua University, Beijing 100084, P. R. China
Funder
Natural Science Foundation of Beijing Municipality
National Natural Science Foundation of China
Publisher
American Chemical Society (ACS)
Subject
General Materials Science
Link
https://pubs.acs.org/doi/pdf/10.1021/acsami.1c11292
Reference40 articles.
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