Rapid Selective Ablation and High-Precision Patterning for Micro-Thermoelectric Devices Using Femtosecond Laser Directing Writing-Reference-Cited by-同舟云学术

Rapid Selective Ablation and High-Precision Patterning for Micro-Thermoelectric Devices Using Femtosecond Laser Directing Writing

Author:

Zhou Jie¹,Zhu Wei²³^ORCID,Xie Yujie¹,Yu Yuedong¹,Guo Zhanpeng¹^ORCID,Zhang Qingqing¹,Liu Yutong¹,Deng Yuan²⁴^ORCID

Affiliation:

1. School of Materials Science and Engineering, Beihang University, Beijing 100191, China

2. Research Institute for Frontier Science, Beihang University, Beijing 100191, China

3. Beijing Advanced Innovation Center for Biomedical Engineering, Beihang University, Beijing 100083, China

4. Hangzhou Innovation Institute, Beihang University, Hangzhou 310052, China

Funder

National Natural Science Foundation of China

Fundamental Research Funds for the Central Universities

National Key R&D Program of China

Zhejiang Provincial Key R&D Program of China

Publisher

American Chemical Society (ACS)

Subject

General Materials Science

Link

Reference44 articles.

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