1. Micro Nano System Research Center, College of Information and Computer & Key Lab of Advanced Transducers and Intelligent Control System of the Ministry of Education, Taiyuan University of Technology, Taiyuan 030024, China
2. Department of Mechatronics and Vehicle Engineering, Taiyuan University, Taiyuan 030012, China
3. College of Materials Science and Engineering, Taiyuan University of Technology, Taiyuan 030024, China
4. College of Mechanical and Vehicle Engineering, Taiyuan University of Technology, Taiyuan 030024, China