Conformal and Stoichiometric Chemical Vapor Deposition of Silicon Carbide onto Ultradeep Heterogeneous Micropores by Controlling the Initial Nucleation Stage
Author:
Affiliation:
1. Department of Materials Engineering, The University of Tokyo, Bunkyo, Tokyo 113-8656, Japan
2. Technology Platform Center, Technology & Intelligence Integration, IHI Corporation, Isogo, Yokohama 235-8501, Japan
Funder
Ministry of Economy, Trade and Industry
Japan Society for the Promotion of Science
Publisher
American Chemical Society (ACS)
Subject
General Materials Science
Link
https://pubs.acs.org/doi/pdf/10.1021/acsami.1c13117
Reference80 articles.
1. CONTINUOUS SILICON CARBIDE FIBER OF HIGH TENSILE STRENGTH
2. Development of a silicon carbide fibre with high tensile strength
3. Fibre-matrix interphases and interfaces in ceramic matrix composites processed by CVI
4. The design of the fibre-matrix interfacial zone in ceramic matrix composites
5. Design, preparation and properties of non-oxide CMCs for application in engines and nuclear reactors: an overview
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