1. Biomaterial Processing and Products, VTT Technical Research Centre of Finland Ltd., Tietotie 4E, 02044 Espoo, Finland
2. Microelectronics, VTT Technical Research Centre of Finland Ltd., Tietotie 3, 02044 Espoo, Finland
3. Faculty of Engineering and Natural Sciences, Tampere University, P.O. Box 541, 33101 Tampere, Finland
4. Department of Applied Physics, Aalto University, P.O. Box 15100, 00076 Espoo, Finland