1. Institute of Microstructure Technology, Karlsruhe Institute of Technology, Hermann-von-Helmholtz-Platz 1, 76344 Eggenstein-Leopoldshafen, Germany
2. Light Technology Institute, Karlsruhe Institute of Technology, Engesserstr. 13, 76131 Karlsruhe, Germany
3. Thin Film Technology (TFT), Karlsruhe Institute of Technology, Kaiserstr. 12, 76131 Karlsruhe, Germany