Selective Electroless Metallization of Patterned Polymeric Films for Lithography Applications
Author:
Affiliation:
1. U.S. Naval Research Laboratory, Center for Bio/Molecular Science & Engineering (Code 6910), 4555 Overlook Avenue, S.W. Washington, D.C. 20375
Publisher
American Chemical Society (ACS)
Subject
General Materials Science
Link
https://pubs.acs.org/doi/pdf/10.1021/am800121d
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