A Selective Review of the Quantification of Defect Dynamics in Growing Czochralski Silicon Crystals
Author:
Affiliation:
1. MEMC Electronic Materials, Inc., 501 Pearl Drive, St. Peters, Missouri 63376
Publisher
American Chemical Society (ACS)
Subject
Industrial and Manufacturing Engineering,General Chemical Engineering,General Chemistry
Link
https://pubs.acs.org/doi/pdf/10.1021/ie0500422
Reference72 articles.
1. Silicon Crystals Free of Dislocations
2. Growth of Silicon Crystals Free from Dislocations
3. Etch Pits Observed in Dislocation-Free Silicon Crystals
4. VACANCY CLUSTERS IN DISLOCATION‐FREE SILICON
5. The Elimination of Vacancy-Cluster Formation in Dislocation-Free Silicon Crystals
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