Resists in Microlithography
Author:
Affiliation:
1. Silicone Products Division, General Electric Company, Waterford, NY 12188
2. Department of Chemical Engineering, University of California, Berkeley, CA 94720
Publisher
American Chemical Society
Link
https://pubs.acs.org/doi/pdf/10.1021/ba-1989-0221.ch007
Cited by 3 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Dissolution of waste plastics in biodiesel;Polymer Engineering & Science;2009-11-24
2. The physics of polymer dissolution: Modeling approaches and experimental behavior;Polymer Analysis Polymer Physics;1997
3. 19 Chemical Engineering in the Processing of Electronic and Optical Materials: A Discussion;Perspectives in Chemical Engineering - Research and Education;1991
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