1. State Key Lab of Transducer Technology, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Changning Road 865, Shanghai 200050, China
2. Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, Yuquan Road, Beijing 100049, China
3. ShanghaiTech University, 393 Middle Huaxia Road, Pudong, Shanghai 201210, China