Deposition of Copper by the H2-Assisted Reduction of Cu(tmod)2 in Supercritical Carbon Dioxide: Kinetics and Reaction Mechanism
Author:
Affiliation:
1. Department of Chemical Engineering, University of Massachusetts, Amherst, Massachusetts 01003
Publisher
American Chemical Society (ACS)
Subject
Materials Chemistry,General Chemical Engineering,General Chemistry
Link
https://pubs.acs.org/doi/pdf/10.1021/cm048665d
Reference28 articles.
1. The International Technology Roadmap for Semiconductors: 2003 Edition; Semiconductor Industry Association, 2003.
2. Chemical Fluid Deposition: A Hybrid Technique for Low‐Temperature Metallization
3. Solubilities of Copper(II) and Chromium(III) .beta.-Diketonates in Supercritical Carbon Dioxide
4. Zong, Y. Ph.D. Dissertation. University of Massachusetts Amherst, 2005; p 225.
5. Solubility of chelating agents and metal-containing compounds in supercritical fluid carbon dioxide
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