Surface Functional Group Effect on Atomic Force Microscope Anodization Lithography
Author:
Affiliation:
1. Department of Chemistry, Hanyang University, Seoul 133-791, Korea, The National Program for Tera-Level Nanodevices, Seoul 136-791, Korea, and Complex Fluids Research Laboratory, Korea Institute of Science and Technology, Seoul 130-650, Korea
Publisher
American Chemical Society (ACS)
Subject
Electrochemistry,Spectroscopy,Surfaces and Interfaces,Condensed Matter Physics,General Materials Science
Link
https://pubs.acs.org/doi/pdf/10.1021/la0508083
Reference25 articles.
1. Scanning electron microscopy can form images of patterns in self-assembled monolayers
2. Scanning probe anodization: Nanolithography using thin films of anodically oxidizable materials as resists
3. Silicon nanowires with sub 10 nm lateral dimensions: From atomic force microscope lithography based fabrication to electrical measurements
4. Atomic force microscope based patterning of carbonaceous masks for selective area growth on semiconductor surfaces
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