1. Technology for Silicon Based Micro- and Nanosystems, Institute for Electrical Engineering University of Kiel, Kaiserstr. 2, D-24143 Kiel, Germany
2. Institute for Materials Science, Functional Nanomaterials, University of Kiel, Kaiserstr. 2, D-24143 Kiel, Germany
3. Institute of Solid
State Physics, Friedrich-Schiller-University Jena, Max-Wien-Platz
1, 07743 Jena, Germany
4. Department of Microelectronics and Biomedical
Engineering, Technical University of Moldova, 168 Stefan cel Mare Boulevard, MD-2004, Chisinau, Moldova
5. Fraunhofer Institute for Silicon Technologies (ISIT), Fraunhoferstr. 1, 25524 Itzehoe, Germany