Polymer/Colloid Surface Micromachining: Micropatterning of Hybrid Multilayers-Reference-Cited by-同舟云学术

Polymer/Colloid Surface Micromachining: Micropatterning of Hybrid Multilayers

Published:2008-11-07 Issue:23 Volume:24 Page:13796-13803
ISSN:0743-7463
Container-title:Langmuir
language:en
Short-container-title:Langmuir

Author:

Mohammed Javeed Shaikh¹,McShane Mike¹

Affiliation:

1. Institute for Micromanufacturing, Louisiana Tech University, Ruston, Louisiana, Biomedical Engineering Program, Louisiana Tech University, Ruston, Louisiana

Publisher

American Chemical Society (ACS)

Subject

Electrochemistry,Spectroscopy,Surfaces and Interfaces,Condensed Matter Physics,General Materials Science

Link

https://pubs.acs.org/doi/pdf/10.1021/la802637u

Reference59 articles.

1. Surface micromachining for microelectromechanical systems

2. Micropatterning proteins and synthetic peptides on solid supports: a novel application for microelectronics fabrication technology

3. Gel-Layer-Assisted Directional Electropolymerization: A Versatile Method for High-Resolution Volume and Surface Patterning of Flexible Substrates with Conjugated Polymers

4. Micromachining for optical and optoelectronic systems

5. Highly phosphorus-doped polysilicon films with low tensile stress for surface micromachining using POCl3 diffusion doping

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