Fabrication of Dual Nanopatterns by Spatial Control of Nanodomain Orientation of Block Copolymer Thin Films
Author:
Affiliation:
1. National Creative Research Initiative Center for Smart Block Copolymers, Department of Chemical Engineering, Pohang University of Science and Technology, 77, Cheongam-Ro, Nam-Gu, Pohang, Gyeongbuk 37673, Republic of Korea
Funder
National Research Foundation
Publisher
American Chemical Society (ACS)
Subject
Organic Chemistry,Polymers and Plastics,Process Chemistry and Technology
Link
https://pubs.acs.org/doi/pdf/10.1021/acsapm.0c00710
Reference40 articles.
1. Theory of Microphase Separation in Block Copolymers
2. Functional nanomaterials based on block copolymer self-assembly
3. Unconventional Methods for Fabricating and Patterning Nanostructures
4. Epitaxial self-assembly of block copolymers on lithographically defined nanopatterned substrates
5. Patterning with block copolymer thin films
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