1. State Key
Laboratory for Silicon
Materials and Center for Electron Microscopy, Department of Materials
Science and Engineering, Zhejiang University, Hangzhou, 310027, China
2. Department of Electrical Engineering, University of California, Los Angeles, California 90095,
United States
3. Division of
Materials, The University of Queensland, Brisbane QLD 4072, Australia
4. Department of Electrical and
Computer Engineering, Iowa State University, Ames, Iowa 50011, United States
5. Centre for Microcopy and Microanalysis, The University of Queensland, Brisbane QLD 4072, Australia