1. Department
of Chemical Engineering, National Tsing-Hua University, Hsin-Chu 30013, Taiwan,
R.O.C.
2. Integrated Interconnect & Packaging Division, Taiwan Semiconductor Manufacturing Company, Hsinchu 30075, Taiwan, R.O.C.
3. Exp Interconnect Division, Taiwan Semiconductor Manufacturing Company, Hsinchu
30075, Taiwan, R.O.C.